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Micromachines tools for nanotechnology

Micromachines tools for nanotechnology (ed.) H. Fujita. - New Delhi Springer 2007 - xii, 211p.: ill.; 23cm. - (Microtechnology and MEMS). .

ISBN: 8181282027

Subjects--Topical Terms:
High technology; Molecular electronics; Nanostructure materials.

Dewey Class. No.: 620.5 / M60M

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