Campbell, Stephen A. <br/><br/>
The Science and engineering of microelectronics fabrication 
Stephen A. Campbell. 
 - New York  Oxford University Press  2008 
 - xiv, 603 p.: ill.; 23 cm. 
 - (The Oxford series in electrical and computer engineering). .
<br/><br/><label>ISBN: </label>9780195681444 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semi Conducter - Design and Construction.
<br/><br/><label>Dewey Class. No.: </label>621.38152  / C16S