TY  - BOOK
AU  - Saliterman, Steven S.
TI  - Fundamentals of bioMEMS and medical microdevices
SN  - 819459771
U1  - 610.28 
PY  - 2006///
CY  - Washington
PB  - Spie Press
KW  - Nanotechnology; Microelectromechanical systems
KW  - Microelectromechanical systems
KW  - Biotechnology
ER  -