Micromachines tools for nanotechnology 
(ed.) H. Fujita. 
 - New Delhi  Springer  2007 
 - xii, 211p.: ill.; 23cm. 
 - (Microtechnology and MEMS). .
<br/><br/><label>ISBN: </label>8181282027 
<br/><br/><label>Subjects--Topical Terms: </label><br/>High technology; Molecular electronics; Nanostructure materials.
<br/><br/><label>Dewey Class. No.: </label>620.5  / M60M