000 00611nam a2200181Ia 4500
008 241209s9999 xx 000 0 und d
020 _a9780195681444
040 _aJamia Hamdard
041 _aEnglish
082 _a621.38152
_bC16S
100 _aCampbell, Stephen A.
245 4 _aThe Science and engineering of microelectronics fabrication
_cStephen A. Campbell.
260 _aNew York
_bOxford University Press
_c2008
300 _axiv, 603 p.: ill.; 23 cm.
440 _a (The Oxford series in electrical and computer engineering).
650 _aSemi Conducter - Design and Construction.
942 _cBK
999 _c37555
_d37555