000 00543nam a2200181Ia 4500
008 241213s9999 xx 000 0 und d
020 _a8181282027
040 _aJamia Hamdard
041 _aEnglish
082 _a620.5
_bM60M
245 0 _aMicromachines tools for nanotechnology
_c(ed.) H. Fujita.
260 _aNew Delhi
_bSpringer
_c2007
300 _axii, 211p.: ill.; 23cm.
440 _a(Microtechnology and MEMS).
650 _aHigh technology; Molecular electronics; Nanostructure materials.
700 _aFujita, H.
942 _cBK
999 _c50584
_d50584